| Istražiti uticaj temperature na dubinsko profiliranje standardnog referentnog materijala SRM 2135 koji se sastoji od devet naizmjeničnih slojeva Cr i Ni. Uočen uticaj difuzije na širenje interferentnog sloja metala. Auger dubinsko profiliranje sa atomima kiseonika umjesto argonom pokazuje da je širenje interfejsa mnogo manje zavisno od atoma sa kojima se vrši analiza, a mnogo manje zavisno od atoma sa kojima se vrši analiza, a mnogo više od energije snopa i temperature. Simulacioni model pokazuje kako se kombinacijom atoma snopa i mete može dobiti što vjernija slika strukture tankih slojeva i širine njihovih interfejsa. |
Research should be carried out into the dependence on temperature of depth profiling of standard reference material SRM 2135, which is made up of nine layers of Cr and Ni. The effects of diffusion on the spreading of the interface layer have been noted. Auger depth profiling with atoms of oxygen instead of argon show that the spreading of the interface depends much less on the atoms which are used for analysis and much more on the energy of the beam and the target temperature. A simulation model shows how, with a combination of atoms in the beam and the target, we can obtain a better picture of the actual structure of thin layers and the spreading of their interface. |